Beijing E-Town International Investment and Development Co (also known as E-Town Capital), the Institute of Optoelectronics and the Institute of Microelectronics at the Chinese Academy of Sciences (or CAS) and CAS Holdings, jointly established Beijing RSLaser Photoelectric Technology Co in July 2016.

Beijing RSLaser specializes in the research, development, production, sales and after-sales services of excimer lasers. It is one of the few companies in China with advanced excimer laser technology research and production capabilities and its series of products have filled a gap in the domestic market.

The first domestic high-energy excimer laser designed and developed by Beijing RSLaser was successfully shipped in March 2018, breaking the long-term monopoly of foreign manufacturers.

The company is currently seen by industry peers as being a special developer of achievements and transformations in manufacturing technology projects and complete sets of technology for very large-scale integrated circuits.

In 2016, the company won the Special Prize for the Transformation of Achievements of the Chinese Academy of Sciences in Beijing. In 2018, it was recognized as one of the Top 10 Innovation and Entrepreneurship Hard Technology Demonstration Achievements in Beijing Innovation and Entrepreneurship Week and in 2019 it was recognized as one of the Top 10 New Products and New Technology Achievements of Beijing Innovation and Entrepreneurship Week.

In 2019, the company was certified to establish a post-doctoral scientific research station branch.